Thin film transistor with improved carrier mobilty
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United States of America Patent
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Nov 28, 2017
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N/A
app pub date -
Feb 16, 2016
filing date -
Feb 16, 2015
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Abstract
A thin film transistor is provided, and includes a gate electrode, a first gate dielectric layer, a second gate dielectric layer, a channel layer, a source electrode and a drain electrode. The gate electrode is disposed on a substrate. The first gate dielectric layer is disposed on the gate electrode and the substrate, and has a radio of the number of silicon-hydrogen bonds to the number of nitrogen-hydrogen bonds, in which the ratio is between 0.2 and 1.0. The second gate dielectric layer is disposed on the first gate dielectric layer, and has a radio of the number of silicon-hydrogen bond to the number of nitrogen-hydrogen bonds, in which the ratio is between 0.01 and 0.2. The channel layer is disposed on the second gate dielectric layer. The source electrode and drain electrode are disposed on the channel layer and located at two opposite sides of the channel layer.
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