Flexible single-crystalline semiconductor device and fabrication methods thereof
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United States of America Patent
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Nov 28, 2017
Grant Date -
Jun 25, 2015
app pub date -
Dec 22, 2014
filing date -
Dec 23, 2013
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Abstract
Systems and methods herein relate to the fabrication of a single-crystal flexible semiconductor template that may be attached to a semiconductor device. The template fabricated comprises a plurality of single crystals grown by lateral epitaxial growth on a seed layer and bonded to a flexible substrate. The layer grown has portions removed to create windows that add to the flexibility of the template.
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