Apparatus and method for electrostatic spraying or electrostatic coating of a thin film
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United States of America Patent
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Mar 7, 2017
Grant Date -
Oct 22, 2015
app pub date -
Nov 11, 2013
filing date -
Nov 30, 2012
priority date (Note) -
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Abstract
Provided is a resist film forming device which uses an electrostatic spray device which is capable of forming a thin film with a uniform thickness on a workpiece. A resist film forming device (100), which forms a resist film (108) on a substrate by electrostatic spraying, comprises: a nozzle (102) which, upon application of a prescribed voltage, sprays liquid particles which form the raw material for a resist film (108) toward a substrate (105) having stepped portions (105a); a driving means (111) for causing relative movement of the substrate (105) or the nozzle (102); and a control means (110) for controlling such that the resist film (108) is formed on the substrate (105) having the stepped portions (105a) by the liquid particles.
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