High temperature process chamber lid
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United States of America Patent
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Nov 28, 2017
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N/A
app pub date -
Mar 11, 2014
filing date -
Mar 11, 2013
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Abstract
Lid assemblies for processing chamber and processing chambers including the lid assemblies are described. The lid assemblies include a high temperature lid module and a housing. The high temperature lid module being positioned adjacent a process liner of a processing chamber. The flexible housing positioned around the high temperature lid module and joined to the high temperature lid module with an elastomeric ring.
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