Method for activating an inner surface of a substrate tube for the manufacturing of an optical-fiber preform
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United States of America Patent
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Nov 28, 2017
Grant Date -
Jan 19, 2017
app pub date -
Jul 1, 2016
filing date -
Jul 13, 2015
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Abstract
A method activates the inner surface of a substrate tube via plasma etching with a fluorine-containing etching gas. An exemplary method includes the steps of (i) supplying a supply flow of gas to the interior of a substrate tube, wherein the supply flow includes a main gas flow and a fluorine-containing etching gas flow, (ii) inducing a plasma via electromagnetic radiation to create a plasma zone within the substrate tube's interior, and (iii) longitudinally reciprocating the plasma zone over the length of the substrate tube between a reversal point near the supply side and a reversal point near the discharge side of the substrate tube. The flow of the fluorine-containing etching gas is typically provided when the plasma zone is near the supply side reversal point.
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