Electro-optical modulator

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United States of America Patent

PATENT NO 9829726
SERIAL NO

14345316

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An electro-optical modulator includes a substrate 201; an optical waveguide formed of a silicon-containing i-type amorphous semiconductor 204 on the substrate; and a silicon-containing p-type semiconductor layer 203 and a silicon-containing n-type semiconductor layer 205 arranged apart from each other with the silicon-containing optical waveguide formed of an i-type amorphous semiconductor 204 interposed therebetween and constituting optical waveguides together with the silicon-containing optical waveguide formed of an i-type amorphous semiconductor. The silicon-containing p-type semiconductor layer 203 and/or silicon-containing n-type semiconductor layer 205 area crystalline semiconductor layer.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY3-1 KASUMIGASEKI 1-CHOME CHIYODA-KU TOKYO 100-8921
PHOTONICS ELECTRONICS TECHNOLOGY RESEARCH ASSOCIATION20-10 SEKIGUCHI 1-CHOME BUNKYO-KU TOKYO 112-0014

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujikata, Junichi Tokyo, JP 60 827
Kamei, Toshihiro Ibaraki, JP 9 121
Mori, Masahiko Ibaraki, JP 91 922
Sakakibara, Youichi Ibaraki, JP 11 137
Takei, Ryohei Ibaraki, JP 4 27

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