Method and system for characterization of nano- and micromechanical structures
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 28, 2017
Issued Date -
N/A
app pub date -
May 23, 2013
filing date -
Jun 7, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Method and system in optical microscopy based on the deflection of micro- and nanomechanical structures, upon impact of a laser beam thereon, which simultaneously and automatically provides a spatial map of the static deflection and of the form of various vibration modes, with vertical resolution in the subangstrom range. The invention comprises at least one mechanical structure, an incident laser beam sweeping the surface of the structure, an optometric detector for capturing the laser beam, and frequency excitation means that generate at least two sinusoidal signals at different frequencies in the mechanical structure.
First Claim
Other Claims data not available
Family
International Classification(s)
- G01H:MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....
- B82B:NANO-STRUCTURES; MANUFACTURE OR TREATMENT THEREOF
- G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....
- 2013 Application Filing Year
- G01H Class
- 187 Applications Filed
- 153 Patents Issued To-Date
- 81.82 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01H Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 28, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 28, 2029 |
