Capacitance sensation unit of plane position measurement device
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United States of America Patent
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Nov 28, 2017
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app pub date -
Jun 3, 2015
filing date -
Jun 3, 2015
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Abstract
A capacitance sensation unit of plane position measurement device for performing measurement with submicron definition is able to measure both two-dimensional position and rotational angle relative to a plane object. The main application of the capacitance sensation unit is exemplified with the position measurement of the mover of a flat motor. The capacitance sensation unit is able to measure the position and rotational angle of the mover relative to the surface of a stator in the form of a flat plate.
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