Drive circuit for MEMS resonator startup
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United States of America Patent
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Nov 28, 2017
Grant Date -
Aug 13, 2015
app pub date -
Feb 10, 2015
filing date -
Feb 12, 2014
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Abstract
A drive circuit for a MEMS resonator can include closed loop means for detecting and amplifying a signal of the MEMS resonator, and means for feeding the detected and amplified signal as a feedback signal back to the MEMS resonator. The circuitry also comprises DC bias voltage means for generating for the MEMS resonator a first DC bias voltage, and a second DC bias voltage that is controlled according to measured amplitudes of the MEMS resonator, one of the DC bias voltages being summed into the feedback signal. The circuitry comprises also a start-up circuitry adapted to detect a start-up state, and in response to a detected start-up state change at last one of the DC bias voltages to a predefined level. The state of constant oscillation is achieved reliably and in short time.
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