Method of preventing polysilicon from being contaminated with metals

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United States of America Patent

PATENT NO 9828250
SERIAL NO

13394009

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Abstract

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[Problems] To provide a method of preventing the polysilicon from being contaminated with metals by providing a resin cover on the surface of a metal substrate that comes in contact with the polysilicon, wherein the metal surfaces are reliably prevented from being exposed that is caused by the wear of the cover.

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Patent Owner(s)

Patent OwnerAddress
TOKUYAMA CORPORATIONYAMAGUCHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kondou, Manabu Shunan, JP 6 11
Yoshimura, Reiji Shunan, JP 1 2

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