Flow rate control apparatus, storage medium storing program for flow rate control apparatus and flow rate control method
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United States of America Patent
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Nov 21, 2017
Grant Date -
Feb 4, 2016
app pub date -
Jul 30, 2015
filing date -
Aug 1, 2014
priority date (Note) -
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Abstract
In order to keep a stable flow rate at a set flow rate value when a pressure fluctuation occurs in an upstream side of a valve, without providing an additional sensor for detecting a pressure fluctuation, a flow rate control apparatus is provided with: the valve; a flow rate sensor; a valve control part configured to control the valve so that a deviation between a set flow rate value and a measurement flow rate value is reduced, on the basis of the deviation and a set control coefficient; and a control coefficient setting part configured to set the control coefficient so that when a pressure rise occurs in the upstream side of the valve, a decreased amount in flow due to a decreased opening of the valve and an increased amount in flow due to an increased amount of a differential pressure before and after the valve, are balanced.
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