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United States of America Patent
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Nov 21, 2017
Grant Date -
Mar 15, 2012
app pub date -
Sep 12, 2011
filing date -
Sep 15, 2010
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Abstract
A technique for allowing users to efficiently specify a region of interest (ROI) on a sample for a certain physical quantity (e.g. phase) other than the altitude is provided. A range-indicating image showing a range that can be observed on a sample is displayed on a navigation window in a sample observation display screen. An ROI-indicating frame for specifying a magnified observation range is superposed on the range-indicating image. A list of thumbnails of previously taken magnified images for the same sample is displayed on an image history display window. When an observer selects any image from this list, the thumbnail of the selected image is mapped onto the range-indicating image. With reference to this image, the observer can change the position, size and/or angle of the ROI-indicating frame by a mouse operation. In response to this operation, a magnified image of the sample within the new ROI is acquired.
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