X-ray surface analysis and measurement apparatus

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United States of America Patent

PATENT NO 9823203
APP PUB NO 20160178540A1
SERIAL NO

15060477

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Abstract

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Systems for x-ray diffraction/scattering measurements having greater x-ray flux and x-ray flux density are disclosed. These are useful for applications such as material structural analysis and crystallography. The higher flux is achieved by using designs for x-ray targets comprising a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness/high flux source may then be coupled to an x-ray reflecting optical system, which can focus the high flux x-rays to a spots that can be as small as one micron, leading to high flux density, and used to illuminate materials for the analysis based on their scattering/diffractive effects.

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Patent Owner(s)

Patent OwnerAddress
SIGRAY INC5750 IMHOFF DRIVE SUITE I CONCORD CA 94520

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kirz, Janos Berkeley, US 51 1475
Lewis, Sylvia Jia Yun San Francisco, US 45 1447
Yun, Wenbing Walnut Creek, US 99 3901

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