Contact-free photomixing probe for device and integrated circuit measurement or characterization
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United States of America Patent
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Nov 21, 2017
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app pub date -
Nov 7, 2016
filing date -
Jan 30, 2012
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Abstract
A device for measuring and characterizing solid-state devices or integrated circuits at RF frequencies up to 1.0 THz and beyond is provided that includes a transmitting photomixing probe structure and a receiving photomixing probe structure. The transmitting photomixing probe structure and the receiving photomixing probe structure are ac-coupled to the solid-state device or integrated circuit in a contact-free manner.
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