Mg concentration measuring device

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United States of America Patent

PATENT NO 9823181
SERIAL NO

15240235

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Abstract

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The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of Cp2Mg in a material gas.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTD11-5 HOKOTATE-CHO KAMITOBA MINAMI-KU KYOTO-SHI KYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Daisuke Kyoto, JP 252 4626
Minami, Masakazu Kyoto, JP 24 415
Sakaguchi, Yuhei Kyoto, JP 13 43
Teraoka, Atsuko Kyoto, JP 2 13

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