Displacement measurement of deformable bodies
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United States of America Patent
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Nov 21, 2017
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N/A
app pub date -
May 5, 2016
filing date -
Jun 15, 2015
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Abstract
A method for measuring a position of an object, the method includes probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object. An edge of the object can be sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate.
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