Vacuum pump with abatement function
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United States of America Patent
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Nov 21, 2017
Issued Date -
N/A
app pub date -
Mar 26, 2014
filing date -
Mar 28, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
First Claim
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International Classification(s)
- F23G:CREMATION FURNACES; CONSUMING WASTE BY COMBUSTION
- F23J:REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COM....
- F23L:AIR SUPPLY; DRAUGHT-INDUCING; SUPPLYING NON-COMBUS....
- F04B:POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04C:ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DIS....
- B01D:SEPARATION
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