Inactive gas supply facility and inactive gas supply method
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United States of America Patent
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Nov 21, 2017
Issued Date -
N/A
app pub date -
Jun 18, 2014
filing date -
Jun 26, 2013
priority date (Note) -
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Abstract
A first control device executes, if it is determined that a second control device has become unable to output an operation instruction, continued operation processing for operating an inactive gas supply portion based on the operation instruction that was last output by the second control device. The first control device further executes, if it is determined during execution of continued operation processing that a stop condition is satisfied, operation stop processing for stopping the inactive gas supply portion by suspending the continued operation processing.
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