Thermally stable volatile precursors

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United States of America Patent

PATENT NO 9822446
SERIAL NO

15017105

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Abstract

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A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.

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Patent Owner(s)

Patent OwnerAddress
WAYNE STATE UNIVERSITY656 W KIRBY 4032 F/AB DETROIT MI 48202

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Knisley, Thomas J Monroe, US 5 508
Winter, Charles H Bloomfield Hills, US 47 1516

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