Mesh in mesh backplate for micromechanical microphone

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United States of America Patent

PATENT NO 9820059
SERIAL NO

14894388

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Abstract

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A MEMS backplate. The MEMS backplate includes a first mesh pattern having a first height and a first arrangement of openings, and a second mesh pattern having a second height and a second arrangement of vent hole apertures. The second mesh pattern is contained within the opening formed by the first mesh pattern.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHSTUTTGART GERMANY
AKUSTICA INC2835 EAST CARSON STREET SUITE 301 PITTSBURGH PA 15203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Diamond, Brett Matthew Pittsburgh, US 3 6
Zinn, John W Canonsburg, US 7 14

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