Capacitive MEMS microphone with insulating support between diaphragm and back plate
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United States of America Patent
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Nov 14, 2017
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N/A
app pub date -
Dec 29, 2014
filing date -
Dec 31, 2013
priority date (Note) -
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Abstract
Disclosed is MEMS microphone. The MEMS microphone includes a substrate and a capacitor system disposed on the substrate. The capacitor system has a back plate, a diaphragm, an insulating space formed by the back plate and the diaphragm and at least one insulating support disposed in the insulating space and connected with the back plate or the diaphragm. When the MEMS microphone is working, the insulating support engages with the diaphragm or the back plate thereby dividing the diaphragm into at least two vibrating units which improves the sensitivity and SNR of the MEMS microphone. Meanwhile, the MEMS microphone has the advantage of low cost and is easy to be fabricated.
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