Durable miniature gas composition detector having fast response time
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United States of America Patent
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Nov 14, 2017
Issued Date -
N/A
app pub date -
Dec 29, 2015
filing date -
Mar 29, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measurable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.
First Claim
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Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| US | B2 | US9234876 | Mar 29, 2013 |
| US | B2 | US10475992 | Oct 13, 2017 |
International Classification(s)
- 2015 Application Filing Year
- H01L Class
- 25498 Applications Filed
- 22451 Patents Issued To-Date
- 88.06 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 14, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 14, 2029 |
