Leakage current suppression methods and related structures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9818744
APP PUB NO 20160071965A1
SERIAL NO

14477491

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Abstract

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A method and structure for suppressing band-to-band tunneling current in a semiconductor device having a high-mobility channel material includes forming a channel region adjacent to and in contact with one of a source region and a drain region. A tunnel barrier layer may be formed such that the tunnel barrier layer is interposed between, and in contact with, the channel region and one of the source region and the drain region. In some embodiments, a gate stack is then formed over at least the channel region. In various examples, the tunnel barrier layer includes a first material, and the channel region includes a second material different than the first material. In some embodiments, the semiconductor device may be oriented in one of a horizontal or vertical direction, and the semiconductor device may include one of a single-gate or multi-gate device.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD ("TSMC")NO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Afzalian, Aryan Chastre, BE 23 69

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