Semiconductor device

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United States of America Patent

PATENT NO 9818696
SERIAL NO

15390675

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Abstract

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A semiconductor device includes: a trench; a first electrode is formed in the trench; a first impurity region, which has a first conductivity type and is formed to abut on the trench; a second impurity region, which has a second conductivity type and is formed to abut the trench; an insulating film, which is formed on the front surface of the semiconductor substrate; a conductive plug, which is formed to penetrate through the insulating film and is electrically connected to the first impurity region and the second impurity region; wherein the conductive plug includes: a silicon layer made of silicon other than a single crystal; a silicide crystallite contained in the silicon layer; and a blocking layer that is formed to cover sides of the silicon layer and is made of a material that is impervious to the silicide crystallites.

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Patent Owner(s)

Patent OwnerAddress
SANKEN ELECTRIC CO LTD3-6-3 KITANO NIIZA-SHI SAITAMA-KEN 352-8666

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukunaga, Shunsuke Niiza, JP 18 34
Kondo, Taro Niiza, JP 20 32
Kudo, Shinji Niiza, JP 24 115

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