Tunable wavelength filter with embedded metal temperature sensor and its application to external-cavity type tunable wavelength laser
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United States of America Patent
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Nov 14, 2017
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Oct 24, 2014
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Oct 24, 2013
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Abstract
Provided are a tunable wavelength filter with an embedded metal temperature sensor and an external-cavity type tunable wavelength laser module. In detail, the tunable wavelength filter with an embedded metal temperature sensor and the external-cavity type tunable wavelength laser module achieve wavelength stability by forming a metal temperature sensor using a resistance change of a metal thin film according to temperature on a point on an isothermal layer having the same temperature distribution as the optical waveguide during a process for fabricating the optical waveguide with polymer to accurately measure a temperature of an optical waveguide.
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