Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure
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United States of America Patent
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Nov 14, 2017
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Nov 29, 2013
filing date -
Nov 30, 2012
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Abstract
The present invention relates to a method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, implemented in a measuring station. The measuring method comprises:
- a step in which the measuring module (5) couples to the rigid casing (2), thereby defining a first measuring volume (V1) between the casing-measuring interface (16) and the coupled rigid casing (2) in order to measure contamination of the internal walls of the rigid casing (2); anda step in which the door (3) couples to the measuring module (5), thereby defining a second measuring volume (V2) between said measuring face (22) and the opposite door (3) in order to measure contamination of the door (3).
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