Methods and apparatus for the preparation of microscopy samples by using pulsed light
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United States of America Patent
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Nov 14, 2017
Grant Date -
Aug 22, 2013
app pub date -
Feb 12, 2013
filing date -
Feb 17, 2012
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Abstract
Methods and apparatus are disclosed for the preparation of microscopic samples using light pulses. Material volumes greater than 100 μm3 are removed. The methods include inspecting an object with a scanning electron microscope (SEM) or a focused ion beam (FIB). The inspection includes recording an image of the object. The methods also includes delineating within the object a region to be investigated, and delineating a laser-machining path based on the image of the object so that a sample can be prepared out of the object. The methods further include using laser-machining along the delineated laser-machining path to remove a volume that is to be ablated, and inspecting the object with the scanning electron microscope (SEM) or a focused ion beam (FIB).
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