Capacitive ultrasonic transducer
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United States of America Patent
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Nov 14, 2017
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app pub date -
Jun 19, 2012
filing date -
Jun 24, 2011
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Abstract
A capacitive ultrasonic transducer includes a sensor head having a back plate, the structured front side of which is provided with an insulation layer, and the back side of which is provided with an electrode. In order to achieve an improved construction by means of which increased temperature resistance up to several hundred degrees Celsius can be achieved even in strongly oxidizing and reducing media, the membrane provided as a sound generator is subjected to tensile stress in a planar direction.
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