Semiconductor structure with multiple transistors having various threshold voltages
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United States of America Patent
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Nov 7, 2017
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app pub date -
Jan 30, 2017
filing date -
Jun 27, 2012
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Abstract
A semiconductor structure includes first, second, and third transistor elements each having a first screening region concurrently formed therein. A second screening region is formed in the second and third transistor elements such that there is at least one characteristic of the screening region in the second transistor element that is different than the second screening region in the third transistor element. Different characteristics include doping concentration and depth of implant. In addition, a different characteristic may be achieved by concurrently implanting the second screening region in the second and third transistor element followed by implanting an additional dopant into the second screening region of the third transistor element.
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