Charged particle source
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United States of America Patent
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Nov 7, 2017
Grant Date -
May 4, 2017
app pub date -
Jan 12, 2017
filing date -
Dec 9, 2014
priority date (Note) -
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Abstract
This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.
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