Method, image processing system and computer-readable recording medium for item defect inspection

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United States of America Patent

PATENT NO 9811899
SERIAL NO

15099609

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Abstract

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A method, image processing system, and computer-readable recording medium for item defect inspection are provided. The method is as follows. A test image and a reference image of a test item are received. A test block and a corresponding reference block are obtained from the test image and the reference image to generate a test block image and a reference block image. The test block image and the reference block image are respectively partitioned into multiple sub-blocks. All interfering sub-blocks are identified and filtered out from the test block image and the reference block image, and a shift calibration parameter is obtained accordingly. The test block in the test image is calibrated based on the shift calibration parameter to generate a calibrated test block image. The calibrated test block image and the reference block image are compared to obtain defect information of the test item corresponding to the test block.

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Patent Owner(s)

Patent OwnerAddress
POWERCHIP SEMICONDUCTOR MANUFACTURING CORPORATIONHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chien, Hao-Yu Taoyuan, TW 1 10
Hsu, Chan-Hao Hsinchu, TW 1 10
Ying, Tzung-Hua Hsinchu, TW 8 19

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