Apparatus and method for driving and measuring a MEMS mirror system
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United States of America Patent
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Nov 7, 2017
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N/A
app pub date -
Apr 22, 2015
filing date -
Apr 30, 2014
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Abstract
The present invention relates to an apparatus for driving and measuring a MEMS mirror system, the MEMS mirror system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, having a pulse generator and a measuring unit, each electrically connected to the coil. The pulse generator is preferably configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil. The measuring unit is preferably configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal. In a further aspect of the invention a method is provided for driving and measuring the MEMS mirror system.
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