Method and apparatus of operating a scanning probe microscope

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United States of America Patent

PATENT NO 9810713
SERIAL NO

15057963

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Abstract

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Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Shuiqing Santa Barbara, US 28 165
Hu, Yan Ventura, US 66 296
Ma, Ji Thousand Oaks, US 49 352
Shi, Jian Ventura, US 115 925
Su, Chanmin Ventura, US 62 764

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