Damage determination of V-shaped groove guide on roller V-shaped
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United States of America Patent
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Nov 7, 2017
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app pub date -
Jan 21, 2015
filing date -
Jan 21, 2015
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Abstract
A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers is disclosed. Based on the disclosed technical means, the efficacy may be achieved that a damage situation may be automatically examined and notified to maintain a yield in the slicing process in an online high speed environment.
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