Aromatic resins for underlayers

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United States of America Patent

PATENT NO 9809672
SERIAL NO

15363114

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Abstract

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Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Auger, Robert L Midland, US 15 250
Cho, Sung Wook Gyeonggi-do, KR 37 122
Cui, Li Westborough, US 40 40
Li, Mingqi Shrewsbury, US 105 434
Trefonas,, III Peter Medway, US 102 645
Yamada, Shintaro Shrewsbury, US 90 484

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