Flexible substrate holder, device and method for detaching a first substrate
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United States of America Patent
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Oct 31, 2017
Grant Date -
Apr 9, 2015
app pub date -
Dec 22, 2011
filing date -
Dec 22, 2011
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Abstract
A flexible substrate mount for holding a first substrate when the first substrate is being detached from a second substrate, and detachment means for debonding of the second substrate by bending the first substrate. Furthermore, this invention relates to a device for detaching a first substrate from a second substrate in one detachment direction (L) with the following features: a substrate mount for holding the first substrate, said first substrate mount being flexible in the detachment direction (L), a substrate mount for holding the second substrate and detachment means for the debonding of the first substrate from the second substrate as the first substrate bends, and a method of using the same.
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