Hydrogen COGas for carbon implant

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United States of America Patent

PATENT NO 9805912
APP PUB NO 20120118232A1
SERIAL NO

12948369

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Abstract

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A system, apparatus and method for increasing ion source lifetime in an ion implanter are provided. Oxidation of the ion source and ion source chamber poisoning resulting from a carbon and oxygen-containing source gas is controlled by utilizing a hydrogen co-gas, which reacts with free oxygen atoms to form hydroxide and water.

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Patent Owner(s)

  • AXCELIS TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Colvin, Neil K Merrimack, US 27 130
Hsieh, Tseh-Jen Rowley, US 30 129

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