Observation and photography apparatus
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United States of America Patent
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Oct 31, 2017
Grant Date -
Jul 2, 2015
app pub date -
Jun 18, 2013
filing date -
Jun 21, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An observation and photography apparatus that has a polishing mechanism attached thereto. The polishing mechanism is provided with a turntable with a perpendicular rotation shaft, a polishing cloth for polishing the surface of a sample attached to the bottom surface of the turntable, and a polishing-fluid spraying nozzle disposed below the polishing cloth for spraying polishing fluid containing polishing material upward to we the polishing cloth.
First Claim
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International Classification(s)
- B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- B23H:WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRA....
- C25F:PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIAL....
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