Method of manufacturing a pressure sensor
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United States of America Patent
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Oct 31, 2017
Grant Date -
Oct 30, 2014
app pub date -
Apr 29, 2014
filing date -
Apr 30, 2013
priority date (Note) -
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Abstract
A method of manufacturing an overheat or fire alarm detection system, comprises the steps of micromachining a pressure sensor and securing a sensor tube in fluid communication with the pressure sensor. The sensor tube may comprise a hollow tube containing a material that evolves gas upon heating. The micromachining step may comprise doping at least a portion of a first layer, forming a cavity at least partially within the doped portion and forming a deformable diaphragm over the cavity.
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