Deposition mask production method and laser processing apparatus

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United States of America Patent

PATENT NO 9802221
SERIAL NO

14809086

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Abstract

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A method including: a first step of forming a mask member having a structure in which a magnetic metal member provided with through-holes is in tight contact with one surface of a film; a second step of forming a plurality of preliminary opening patterns by subjecting the film to penetration processing by irradiating laser beams at predetermined regular positions in the plurality of through-holes; and a third step of performing laser processing so as to form each opening pattern over the corresponding preliminary opening pattern, is provided.

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Patent Owner(s)

Patent OwnerAddress
V TECHNOLOGY CO LTDKANAGAWA KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mizumura, Michinobu Yokohama, JP 113 613

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