MEMS resonator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9800223
SERIAL NO

13263746

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Abstract

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A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency.

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Patent Owner(s)

  • NXP B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bontemps, Joep J M Groningen, NL 1 0
Koning, Jan Jacob Nijmegen, NL 8 79
van, Beek Jozef Thomas Martinus Rosmalen, NL 46 892
van, der Avoort Casper Waalre, NL 28 141

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