Robot drive with radially adjustable sensor connection
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United States of America Patent
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Oct 24, 2017
Issued Date -
N/A
app pub date -
Jan 18, 2013
filing date -
Sep 16, 2011
priority date (Note) -
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Abstract
A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.
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