Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
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United States of America Patent
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Oct 24, 2017
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N/A
app pub date -
Oct 23, 2015
filing date -
Oct 23, 2015
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Abstract
A robot assembly allowing remote actuation of a carriage supported robot. The robot assembly includes a track, a carriage moveable along the track, and a robot mounted to the carriage. The robot includes at least a first arm, and a first driven member coupled to the first arm. The robot assembly further includes a drive assembly having a first driving member, a first transmission member coupled to the first driving member and the first driven member, and a first drive motor coupled to the first driving member. The first drive motor is configured to move the first driving member causing remote rotation of the first driven member and rotation of the first arm. Substrate processing apparatus and methods of transporting a substrate within a substrate processing apparatus are also provided, as are numerous other aspects.
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