Radiometric test and configuration of an infrared focal plane array at wafer probe

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United States of America Patent

PATENT NO 9797942
SERIAL NO

14838048

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Abstract

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FPAs on a wafer can be tested prior to dicing the wafer into individual dies. A focal plane array (FPA) can comprise an array of photodetectors, such as microbolometers, on a semiconductor substrate or die. FPAs can be manufactured on a wafer to make multiple FPAs on a single wafer that can be later diced or divided into individual FPAs. Prior to dicing the wafer, the FPAs can be tested electrically and radiometrically in bulk to characterize individual FPAs, to identify bad pixels, to identify bad chips, to calibrate individual FPAs, and the like. These test results can be used to determine acceptable FPAs and can be used to provide initial settings for imaging systems with the tested and integrated FPA.

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Patent Owner(s)

Patent OwnerAddress
SEEK THERMAL INC6300 HOLLISTER AVE GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Engberg, Andreas Santa Barbara, US 12 135
Parrish, William J San Barbara, US 59 925

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