Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
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United States of America Patent
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Oct 24, 2017
Grant Date -
Sep 10, 2015
app pub date -
Feb 20, 2015
filing date -
Mar 5, 2014
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Abstract
A method of forming a sample and performing correlative S/TEM and APM analysis is provided wherein a sample containing a region of interest is cut from a bulk of sample material and formed into an ultra-thin lamella. The lamella is then analyzed with an S/TEM to form an image. The lamella sample and mount may then go through a cleaning process to remove any contamination. The lamella containing the ROI is then embedded within a selected material and is formed into a needle-shaped sample. The needle-shaped sample is then analyzed with the APM and the resulting data is merged and correlated with the S/TEM data.
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