Scanning probe microscope head design

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United States of America Patent

PATENT NO 9797922
SERIAL NO

15047560

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Abstract

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A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam. A micromirror is mounted to reflect the beam substantially 90° to the planar reflecting surface.

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Patent Owner(s)

Patent OwnerAddress
ANGSTROM SCIENCE INC5425 HOLLISTER AVE SUITE 110 SANTA BARBARA CA 93111

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Erickson, Andrew Norman Santa Barbara, US 13 64
Ippolito, Stephen Bradley Saint Petersburg, US 9 30

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