Test object for measuring the point spread function of an optical system

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United States of America Patent

PATENT NO 9797805
SERIAL NO

14707533

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Abstract

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A test object for measuring the point spread function (PSF) of an optical system having a given Airy diameter (dAiry) comprises a structure to be imaged having a plurality of structure elements to be imaged, wherein the structure elements are embodied and arranged in such a way that the structure has at least two axes of symmetry.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBH73447 OBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arnz, Michael Oberkochen, DE 21 220
Pomraenke, Robert Dresden, DE 9 44
Stoppe, Lars Jena, DE 37 98

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