Method for producing titanium-doped synthetic quartz glass
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United States of America Patent
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Oct 24, 2017
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Feb 7, 2014
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Feb 12, 2013
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Abstract
A method for producing titanium-doped synthetic quartz glass includes:
- (A) providing a liquid SiO2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4;(B) evaporating the liquid SiO2 feedstock material to produce a gaseous SiO2 feedstock vapor;(C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor;(D) converting the SiO2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively;(E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO2 soot body;(F) vitrifying the titanium-doped SiO2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight.
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