Ultrasonic sensor utilizing chemically strengthened glass as substrate
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United States of America Patent
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Oct 17, 2017
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Nov 28, 2014
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Nov 24, 2014
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Abstract
An ultrasonic sensor includes a first electrode, a first piezoelectric layer, a substrate, a second electrode, a second piezoelectric layer, and a third electrode. The first electrode and the first piezoelectric layer are stacked on a first surface of the substrate. The second electrode, the second piezoelectric layer, and the third electrode are stacked on a second surface opposite to the first surface of the substrate. The substrate is made of chemically strengthened glass.
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