Split gate non-volatile memory cell having a floating gate, word line, erase gate, and method of manufacturing

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United States of America Patent

PATENT NO 9793279
SERIAL NO

15182527

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Abstract

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A memory device including a silicon semiconductor substrate, spaced apart source and drain regions formed in the substrate with a channel region there between, and a conductive floating gate disposed over a first portion of the channel region and a first portion of the source region. An erase gate includes a first portion that is laterally adjacent to the floating gate and over the source region, and a second portion that extends up and over the floating gate. A conductive word line gate is disposed over a second portion of the channel region. The word line gate is disposed laterally adjacent to the floating gate and includes no portion disposed over the floating gate. The thickness of insulation separating the word line gate from the second portion of the channel region is less than that of insulation separating the floating gate from the erase gate.

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Patent Owner(s)

Patent OwnerAddress
SILICON STORAGE TECHNOLOGY INC450 HOLGER WAY SAN JOSE CA 95134

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chun-Ming New Taipei, TW 107 946
Do, Nhan Saratoga, US 220 1249
Su, Chien-Sheng Saratoga, US 46 662
Tadayoni, Mandana Cupertino, US 14 97
Wu, Man-Tang Hsinchu County, TW 18 229
Yang, Jeng-Wei Zhubei, TW 32 312

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